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Self-alignment of microstructures based on lateral fluidic force ...
WebThese contact cuts are formed self-aligned by the process of forming the oxide masking layer over the PMOS and NMOS devices and alternately masking the oxide in one active area and etching the other so that the nitride acts as a contact mask, and the etchant for the oxide mask automatically completes the contact cuts through the oxide interlayer … WebAn alignment process that compensates for errors introduced by component fabrication is very useful. This alignment method is called “active” because the assembly technician or engineer actually uses the … cindy yan toronto
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